By Kash L. Mittal
This publication chronicles the complaints of the 1st foreign Symposium on Adhesion features of skinny motion pictures held less than the auspices of MST meetings in Newark, New Jersey, October 28-29, 1999.
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Extra info for Adhesion Aspects of Thin Films
S. Kumar, P. N. Dixit, D. Sarangi and R. Bhattacharyya, J. Appl. Phys. 85, 3866 (1999). 5. S . J. Bull, A. M. Jones and A. R. McCabe, Surf: Coat. Technol. 54/55, 173 (1992). 6. P. J. Martin and R. P. Netterfield, Thin Solid Films 199, 351-358 (1991). 7. S . Scaglione, D. Flori and G. Emiliani, Appl. S u r j k e Sci. 43. 224-227 (1989). 8. D. J. Kester and R. Messier, J. Appl. Phys. 72, 504 (1992). 9. M. Alvisi, S . Scaglione, S . Martelli, A. Rizzo and L. Vasanelli, Thin Solid Films 354, 19-23 (1999).
Keywords: Intrinsic stress; surface stress; island growth. 1. INTRODUCTION Virtually all thin films grown on a substrate are in a state of internal stress [ 1- 81. In the case of non-epitaxial films, the types of stresses observed in thin films can be classified as either thermal stresses generated by a temperature change when the film and substrate have different coefficients of thermal expansion, or intrinsic stresses resulting from processes that would change the dimensions of the film were it not attached to the substrate.
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